表面电阻测试仪 Surface Resistance Tester

表面电阻测试仪 Surface Resistance Tester

2.1.1 参考标准：ANSI/ESD STM11.11-2022, ANSI/ESD STM11.12-2021, ANSI/ESD
STM11.13-2021,ESD TR53-01-22
2.1.2 技术要求 Technical requirements
2.1.2.1 电阻测试仪 Resistance Measurement Apparatus (Refer to ANSI/ESD STM11.11-
2021, ANSI/ESD STM11.12-2021, ANSI/ESD STM11.13-2021, ESD TR53-01-22)
仪表应能够进行从 1.0E+03 ohms 到 1.0E+12 ohms 的测量。
仪表的电路电压应为：1.0E+06 ohms 及以上的负载测量时电压为 100 伏 (±5%)。
≥1.0E+04 欧姆到 < 1.0E+06 ohms 测量时电压为 10 伏 (±5%)。对于 1.0E+03
ohms 到小于 1.0E+04 ohms 的测量，仪表应具有 10 伏 (±5%) 的开路或负载电压。
The meter shall be capable of making measurements from 1.0E+03 ohms to
1.0E+12 ohms.
The meter shall have a circuit voltage of :
100 volts (±5%) while under load for measurements of 1.0E+06 ohms and above.
10 volt (±5%) while under load for measurements from ≥1.0E+04 ohms to less than
1.0E+06 ohms.
The meter shall hane an open circuit or under load voltage of 10 volt (±5%) for
measurements from 1.0E+03 ohms to less than 1.0E+04 ohms.
2.1.2.2 两点间电极 Two-Point Probe (Refer to ANSI/ESD STM11.13-2021)
两点间电阻测试探头为特制探头，参见图 6。其主要特征要求为：两柱状电极直径
为3.2mm ± 0.1mm，电极中心到中心的距离6.4mm，电极材料镀金且存在在4.3mm±
0.1 mm 的行程内有 4.7 牛+/-10%的弹簧力。电极接触端圆柱状材料导电橡胶长
3.2mm ± 0.1mm，硬度 60+/-10（邵氏 A 级），其体积电阻小于 500 ohm-cm。
注：在金属表面上已 10V 电压测量时，两个电极之间的电阻应小于 1.0E+03 欧姆。
The two-point probe consists of an insulated metal body with a PTFE insulator
inserted into each end. PTFE is used because of excellent dielectric properties.
One insulator holds test leads; the other holds receptacles that accept spring loaded pins.One receptacle is surrounded by a cylindrical insulator, which is
surrounded by a metal shield. The pins are gold-plated and have a spring force of
4.7 Newton + 10% at a travel of 4.3 mm± 0.1 mm. The pins tips are machined to
accept friction fitted 3.2 ± 0.1 mm diameter electrically conductive rubber
electrodes or conductive rubber boots. The rubber has a Shore-A durometer
hardness of 50-70 Electrode volume resistivity is < 500 ohm-cm. The electrodes
are spaced 6.4 mm centerto center.
NOTE: The resistance between two resistance measurement electrodes should be
verified to be less than 1.0E+03 ohms when measured at 10 volts on a metallic
surface.

2.1.2.3 圆柱形电极 Cylindrical Electrodes (Refer to ESD TR53-01-22)
圆柱形电极，重量为 2.27 kg±2.5%（5 磅±2.5%），直径为 63.5 mm±5%（2.5 英寸
±5%），肖氏（IRHD）硬度介于 50 和 70 之间的导电材料。在金属表面上测量时，
两个电极之间的电阻应小于 1.0E+03 欧姆。
Cylindrical electrodes with a weight of 2.27 kg ± 2.5% (5 pounds ± 2.5%) and a
diameter of 63.5 mm ± 5% (2.5 inches ± 5%) having a contact of electrically
conductive material with a Shore-A (IRHD) durometer hardness between 50 and
70. The resistance between two electrodes should be less than 1.0E+03 ohms
when measured on a metallic surface.
2.1.2.4 仪表分辨率：数显式，用于符合性验证的设备要求小数点后 1 位。例如标准电阻为
1 兆欧，仪器应显示为 1.0E+06 ohms.
Instrument resolution: digital display, Equipment used for compliance verification
requires 1 decimal place. For example, if the standard resistance is 1 megohm, the
instrument should display as 1.0E+06 Ohms.
2.1.2.5 仪表精度 Meter accuracy
精度为±10 %。
accuracy ± 10%.